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Sputtering Reference Table

Gas Temp$n=0.001~\text{cm}^{-3}$$n=0.01~\text{cm}^{-3}$$n=0.1~\text{cm}^{-3}$$n=1~\text{cm}^{-3}$
$10^1~\text{K}$$1.8\times10^{21}~\text{yr}$$1.8\times10^{20}~\text{yr}$$1.8\times10^{19}~\text{yr}$$1.8\times10^{18}~\text{yr}$
$10^2~\text{K}$$5.8\times10^{18}~\text{yr}$$5.8\times10^{17}~\text{yr}$$5.8\times10^{16}~\text{yr}$$5.8\times10^{15}~\text{yr}$
$10^3~\text{K}$$1.8\times10^{16}~\text{yr}$$1.8\times10^{15}~\text{yr}$$1.8\times10^{14}~\text{yr}$$1.8\times10^{13}~\text{yr}$
$10^4~\text{K}$$5.8\times10^{13}~\text{yr}$$5.8\times10^{12}~\text{yr}$$5.8\times10^{11}~\text{yr}$$5.8\times10^{10}~\text{yr}$
$10^5~\text{K}$$1.8\times10^{11}~\text{yr}$$1.8\times10^{10}~\text{yr}$$1.8\times10^{9}~\text{yr}$$1.8\times10^{8}~\text{yr}$
$10^6~\text{K}$$6.8\times10^{8}~\text{yr}$$6.8\times10^{7}~\text{yr}$$6.8\times10^{6}~\text{yr}$$6.8\times10^{5}~\text{yr}$
$10^7~\text{K}$$1.0\times10^{8}~\text{yr}$$1.0\times10^{7}~\text{yr}$$1.0\times10^{6}~\text{yr}$$1.0\times10^{5}~\text{yr}$
$10^8~\text{K}$$1.0\times10^{8}~\text{yr}$$1.0\times10^{7}~\text{yr}$$1.0\times10^{6}~\text{yr}$$1.0\times10^{5}~\text{yr}$


$\tau_\text{sp}=a\Big|\frac{da}{dt}\Big|^{-1}\approx(0.17~\text{Gyr})\Big(\frac{a_{-1}}{\rho_{-27}}\Big)\Big[\Big(\frac{T_0}{T}\Big)^\omega+1\Big]$

These numbers assume a constant grain radius of 0.1 $\mu$m.

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